Solution override title: UV Curing
Solution override text:

Combined pressure and vacuum technologies for reliable curing of any substrate size and thickness

Ultraviolet curing (UV curing) is a photochemical process in which high-intensity ultraviolet light is used to instantly cure coatings or adhesives.
CoreFlow’s aeromechanical solutions are integrated into the UV curing process stage, allowing glass substrates to pass through the UV curing process mechanism.
With CoreFlow’s unique air floating solution, the coated substrate floats above the stage at a uniform air gap of ~30 μm, ensuring highly- consistent exposure to the UV curing light.
CoreFlow’s air-floating solution can be designed for glass substrates of any size and thickness and can be built into UV-curing tools of any length.
The use of UV light exposes the stage to high levels of heat, and a cooling method is required to avoid substrate warping and performance issues.
As an innovation-driven turnkey solution provider, CoreFlow produced specially designed stages for a large Korean OEM. The stages employ embedded water-cooling channels that are connected to a water refrigeration system. 

 

 

 

Key Features and Benefits

  • Air-gap accuracy of up to ±5μm
  • Consistent exposure to UV light without any seam lines
  • Embedded cooling system
  • Low air consumption (pressure and vacuum) levels save on energy costs
  • The durable surface is resistant to damage from scratches, dust, and fluids
  • Proven handling system for UV curing applications – on substrates of any size, any thickness
  • Few moving parts – reduces maintenance costs

Solution override title: Slit Coating
Solution override text:

High precision and optimal air flow uniformity for mura-free processes

CoreFlow, a leading provider of advanced, aeromechanical-based handling and conveying solutions, provides advanced non-contact handling systems used in FPD photoresist coating (slit coating) applications for Color Filter and TFT array manufacturing.
CoreFlow systems, which are suitable for the coating processes of LCD and OLED flat panels displays, are installed at several world-leading FPD fabrication plants.
CoreFlow’s slit coating air-floating stage delivers exceptional ±5 μm air-gap accuracy in the process zone, providing unmatched reliability for glass substrate handling. As a result, the coating quality is significantly improved.
The system’s unique SmartNozzle™ technologies provide the required air-cushion stiffness to ensure air-gap accuracy and stability.

Slit Coater System

The air floating system is designed as a single, seamless stage to address any glass substrate size, ensuring a smooth, consistent substrate coating, and preventing Mura effects.

Key Features and Benefits

  • Air-gap accuracy of ±5 μm (up to ±2 μm)
  • Enables consistent coating without any seam lines
  • Nominal air-gap at the process zone: 30 ±5µm
  • Proven handling system for FPD coating applications – on substrates of any size, any thickness
  • Low air consumption (pressure and vacuum) levels save on energy costs
  • The durable surface is resistant to damage from scratches, dust, and fluids
  • Very few moving parts (motion system) - reduces maintenance costs

Solution override title: FPD Inspection
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High precision non-contact solutions for AOI of any substrate size and thickness

With hundreds of installations worldwide, including state-of-the-art G10 stages, CoreFlow provides proven, best-in-class air floating solutions for FPD Automated Optical Inspection (AOI) applications. CoreFlow’s handling platform integrates into AOI systems to provide consistent and reliable handling of glass substrates, with maximum positioning accuracy.
The non-contact, aeromechanical stage utilizes CoreFlow’s unique Air Cushion and SmartNozzle™ technologies, which ensure substrate stiffness and flatness, while maintaining highly accurate vertical positioning of up to ±5 μm.

AOI system

CoreFlow’s solution employs a rigid-rail, air-bar structure with a simple pneumatic design that is connected to a high-accuracy PV stage in the inspection zone.

The PV stages are located at both sides of the scan line, providing a highly accurate air gap above the inspection area and the backlight at the scan line. This stage configuration enables a quick implementation and provides superior overall flatness, while utilizing low mass flow rates, thus reducing energy costs.

Key features and Benefits

  • Optimal air-gap accuracy and uniform flatness  
  • Reliable performance across the entire inspection system
  • Customized air-bars, support glass substrates of any dimension, enabling:
    • Minimal number of pressure and vacuum connections
    • A low number of adjustment springs
    • Simple interface to system base structure
  • Low air consumption (pressure and vacuum) levels save on energy costs
  • The durable surface is resistant to damage from scratches, dust, and fluids
  • Very few moving parts (motion system) - reduces maintenance costs

Solution override title: OLED InkJet Printing
Solution override text:

Unmatched process zone accuracy and temperature uniformity solutions

Responding to the industry challenges of manufacturing ultra-thin, flexible, large-area Organic LED (OLED) displays, CoreFlow provides proven, best-in-class air-floating solutions for OLED InkJet printing systems.
InkJet printing technologies, used in OLED thin-film encapsulation (TFE) and RGB pixel patterning, are entering an advanced development stage. CoreFlow’s handling platform is integrated into OLED InkJet printing systems, providing consistent and reliable handling of glass substrates with maximum positioning accuracy.
The non-contact, aeromechanical stage utilizes CoreFlow’s unique Air Cushion and SmartNozzle™ technologies, which ensure substrate stiffness and flatness, while maintaining highly accurate vertical positioning of up to ±5 μm in the printing zone. 

 

 

Key Features and Benefits:

  • Air-gap accuracy of ±5 μm at printing zone
  • Consistent coating without any seam lines
  • Low air consumption (pressure and vacuum) levels save on energy costs
  • The durable surface is resistant to damage from scratches, dust, and fluids
  • Proven handling system for FPD InkJet printing applications – on substrates of any size, any thickness
  • Very few moving parts (motion system) - reduces maintenance costs
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